AMAT 0010-23716

Product Introduction: The AMAT 0010-23716 is a precision gas flow control component used in Applied Materials semiconductor wafer processing equipment. It is part of the gas delivery system that supplies process gases (such as NF₃, SiH₄, WF₆, NH₃, O₂, N₂, Ar) to the process chamber at precisely controlled flow rates. This part is typically a Mass Flow Controller (MFC) or a sub-assembly within a gas panel used in PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), or Etch systems.

Amat 0010-44213

  • Precision Performance: Engineered for high-precision control, the AMAT 0010-44213 meets the stringent requirements of semiconductor manufacturing.
  • Environmental Resistance: Operates reliably in high-temperature and high-pressure environments, withstanding harsh industrial conditions.
  • Compatibility: Seamlessly integrates with various semiconductor devices, lithography machines, plasma etching equipment, and other advanced material processing technologies.
  • Interface and Control: Effectively interfaces with AMAT’s equipment modules and control systems, ensuring collaborative operation across the entire production line.

AMAT 0090-07135

Manufacturer: Applied Materials, Inc. Product Overview: Precision-machined gas manifold used in AMAT CVD (Chemical Vapor Deposition) and Etch process chambers. This component distributes process gases uniformly across the wafer surface during thin-film deposition.

AMAT 0100-09123

Manufacturer: Applied Materials, Inc. Product Overview: High-precision electrostatic chuck used in AMAT etching and deposition chambers. This ESC holds 200 mm or 300 mm wafers via Coulombic electrostatic force, enabling uniform heat transfer and wafer clamping without mechanical stress.

AMAT 0100-20100

Manufacturer: Applied Materials, Inc. Product Overview: Precision-machined showerhead used in AMAT PECVD (Plasma Enhanced CVD) and ALD (Atomic Layer Deposition) chambers. Distributes process gas uniformly across the wafer surface through hundreds of micro-orifices.

AMAT 0100-71224

Manufacturer: Applied Materials, Inc. Product Overview: Automatic impedance matching network used in AMAT sputter and PECVD chambers. This assembly dynamically matches the RF generator output (typically 13.56 MHz or 2 MHz) to the varying plasma load impedance during process transitions.

AMAT 0100-71229

Manufacturer: Applied Materials, Inc. Product Overview: Solid-state RF power generator delivering 13.56 MHz output for plasma-enhanced processes in AMAT PECVD and etch chambers. Replaces legacy tube-based generators with higher reliability and faster modulation.

AMAT 0100-71267 Semiconductor Control Module

echnical Specifications:
  • Compatibility: Designed specifically for integration with Applied Materials' semiconductor processing systems.
  • Electrical Characteristics: Details about voltage requirements, current ratings, and power consumption would be specified in technical documentation tailored to its specific application within the system.
  • Physical Attributes: Dimensions and weight suitable for installation within semiconductor manufacturing equipment, ensuring compatibility with existing hardware and facilitating ease of replacement or maintenance.
  • Environmental Tolerance: Engineered to withstand the demanding conditions inside semiconductor fabrication facilities, including resistance to electromagnetic interference, temperature variations, and particulate matter.

AMAT 0100-71271

Model Series: Centura / Endura Process Modules Product Description: This is a precision gas distribution component used in Applied Materials plasma etch and deposition chambers. It functions as a showerhead that delivers process gases uniformly across the wafer surface during thin-film deposition or etching operations.

AMAT 0100-71275

Model Series: Centura / Endura Etch Modules Product Description: A high-purity alumina ceramic insulator ring used in AMAT plasma etch chambers. It provides electrical isolation between the RF-powered electrode and the grounded chamber wall while withstanding high thermal loads.

AMAT 0100-71278

Model Series: Centura / Producer Platforms Product Description: A variable vacuum capacitor used in the RF matching network of AMAT plasma process chambers. It enables real-time impedance matching between the RF generator and the plasma load for maximum power transfer.

AMAT 0100-71309

Model Series: Endura / Centura Etch Chambers Product Description: A replaceable chamber liner (also called chamber wall panel) that lines the interior of AMAT plasma etch chambers. It protects the chamber body from plasma erosion and chemical attack while contributing to process uniformity.