AMAT 0100-71309

Model Series: Endura / Centura Etch Chambers

Product Description:
A replaceable chamber liner (also called chamber wall panel) that lines the interior of AMAT plasma etch chambers. It protects the chamber body from plasma erosion and chemical attack while contributing to process uniformity.

Category:
Description

Technical Specifications:

  • Part Number: 0100-71309
  • Material: 6061-T6 Aluminum with Anodized Al₂O₃ surface (50μm thick)
  • Dimensions: 400mm × 350mm × 12mm (per panel)
  • Set Quantity: 6 panels per kit
  • Surface Roughness: Ra < 0.8 μm
  • Particle Emission: <0.1 particles/cm² >0.3μm (ISO 14644-1 Class 5)

Key Features:

  • Anodized Surface: 50μm Al₂O₃ layer resists fluorine and chlorine plasma attack
  • Modular Kit: 6 panels cover full 300mm chamber perimeter
  • Low Particle Design: Machined to sub-micron tolerances
  • Grounding Clip Integrated: Each panel includes RF grounding point

Applicable Industry: Semiconductor Manufacturing — Foundry, Logic, MEMS

Installation Requirements:

  • Install with torque of 4 Nm on all 12 mounting screws per panel
  • Verify RF grounding continuity (<0.1Ω) across all panels
  • Perform helium leak check at 1×10⁻⁹ atm·cc/s maximum

Usage Notes:

  • Replace when erosion depth exceeds 0.5mm or particle count exceeds spec
  • Clean with isopropyl alcohol only — no plasma cleaning of installed liners
  • Store flat in anti-static packaging
Reviews (0)

Reviews

There are no reviews yet.

Be the first to review “AMAT 0100-71309”

Your email address will not be published. Required fields are marked *

Shipping and Delivery

MAECENAS IACULIS

Vestibulum curae torquent diam diam commodo parturient penatibus nunc dui adipiscing convallis bulum parturient suspendisse parturient a.Parturient in parturient scelerisque nibh lectus quam a natoque adipiscing a vestibulum hendrerit et pharetra fames nunc natoque dui.

ADIPISCING CONVALLIS BULUM

  • Vestibulum penatibus nunc dui adipiscing convallis bulum parturient suspendisse.
  • Abitur parturient praesent lectus quam a natoque adipiscing a vestibulum hendre.
  • Diam parturient dictumst parturient scelerisque nibh lectus.

Scelerisque adipiscing bibendum sem vestibulum et in a a a purus lectus faucibus lobortis tincidunt purus lectus nisl class eros.Condimentum a et ullamcorper dictumst mus et tristique elementum nam inceptos hac parturient scelerisque vestibulum amet elit ut volutpat.