AMAT 0100-71278

Model Series: Centura / Producer Platforms

Product Description:
A variable vacuum capacitor used in the RF matching network of AMAT plasma process chambers. It enables real-time impedance matching between the RF generator and the plasma load for maximum power transfer.

Category:
Description

Technical Specifications:

  • Part Number: 0100-71278
  • Capacitance Range: 10 pF to 500 pF (continuous)
  • Voltage Rating: 5 kV peak
  • Current Rating: 15 A RMS
  • Cooling Method: Water-cooled (inlet 20°C, max ΔT 10°C)
  • Vacuum Rating: 1×10⁻⁶ Torr
  • Frequency Range: 2 MHz to 60 MHz

Key Features:

  • Motor-Driven Tuning: Stepper motor enables automated impedance matching during process
  • Water-Cooled Electrodes: Prevents thermal drift during long etch runs
  • Vacuum-Sealed Design: No external lubricants — eliminates contamination risk
  • Fast Response Time: <100ms tuning adjustment

Applicable Industry: Semiconductor Manufacturing — All Plasma Etch and CVD Applications

Installation Requirements:

  • Connect cooling water lines with 1/4″ Swagelok fittings
  • Verify vacuum seal integrity at 1×10⁻⁶ Torr for 30 minutes
  • Calibrate tuning range using AMAT Matchbox diagnostic tool

Usage Notes:

  • Service every 10,000 process hours or when VSWR exceeds 1.5:1
  • Do not operate without cooling water flow — thermal damage occurs within 30 seconds
  • Replace stator blades if arcing is detected
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