AMAT 0100-71229

Manufacturer: Applied Materials, Inc.

Product Overview:
Solid-state RF power generator delivering 13.56 MHz output for plasma-enhanced processes in AMAT PECVD and etch chambers. Replaces legacy tube-based generators with higher reliability and faster modulation.

Category:
Description

Material Composition:

  • Power Transistors: LDMOS (Laterally Diffused MOS) — NXP/Freescale BLF188XR
  • PCB: Rogers RO4350B — 4-layer, 2 oz Cu, impedance-controlled 50 Ω
  • Heat Sink: 6063-T5 Aluminum extrusion — Anodized, forced-air cooled
  • Enclosure: Cold-rolled steel — Powder-coated, EMI-shielded
  • Connectors: 7/16 DIN female — 50 Ω, 2 kW rated

Technical Specifications:

Parameter Value
Output Frequency 13.56 MHz (±0.01%)
Output Power Range 100 – 2,000 W (continuous)
Power Stability ±0.5% over 8 hours
Harmonic Suppression > 40 dBc (2nd harmonic), > 50 dBc (3rd harmonic)
Modulation Bandwidth DC – 100 kHz (AM), DC – 10 kHz (FM)
Efficiency > 70% at full power
Cooling Forced air — 80 CFM minimum
Supply Voltage 200–240 VAC, 3-phase, 50/60 Hz
Protection OVP, OCP, OTP, VSWR foldback
Standards SEMI S2, CE, UL 61000-6-4

Functional Characteristics:

  • Solid-state topology — zero warm-up time, instant on/off
  • Digital control — Ethernet/RS-485 interface, recipe-programmable
  • Fast AM modulation — enables advanced plasma pulsing for etch profile control

Applicable Industries:
Semiconductor — PECVD dielectric deposition, capacitively coupled plasma etch

Installation Requirements:

  • 3-phase power — 200–240 VAC, 15 A minimum per phase
  • Ground resistance < 0.5 Ω to facility ground
  • Airflow clearance: 150 mm on all sides, 300 mm on exhaust side
  • Cable: 50 Ω coaxial, RG-213, max 3 m from generator to match network

Usage Notes:

  • Do not operate with airflow interlock bypassed — thermal shutdown at 85°C heatsink
  • Perform quarterly internal dust cleaning to maintain efficiency
  • Replace air filters every 6 months or 2,000 operating hours
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