AMAT 0100-71275

Model Series: Centura / Endura Etch Modules

Product Description:
A high-purity alumina ceramic insulator ring used in AMAT plasma etch chambers. It provides electrical isolation between the RF-powered electrode and the grounded chamber wall while withstanding high thermal loads.

Category: Others

Description

Technical Specifications:

Part Number: 0100-71275
Material: Alumina (Al₂O₃) — 99.7% purity
Outer Diameter: 320mm
Inner Diameter: 280mm
Thickness: 25mm
Dielectric Strength: >15 kV/mm
Thermal Conductivity: 24 W/m·K
Max Operating Temperature: 1100°C

Key Features:

Ultra-High Purity: 99.7% Al₂O₃ minimizes particulate contamination
RF Isolation: Maintains dielectric integrity at 13.56 MHz and 2 MHz RF frequencies
Thermal Shock Resistance: Withstands rapid temperature cycling without cracking
Low Outgassing: <1×10⁻⁹ Torr·L/s·cm² at 150°C

Applicable Industry: Semiconductor Etch — DRIE, SiO₂ Etch, Metal Etch

Installation Requirements:

Seat ring in channel with silicone-free ceramic adhesive
Do not apply mechanical stress exceeding 50 N radial force
Bake at 200°C for 4 hours prior to first use to remove absorbed moisture

Usage Notes:

Inspect for micro-cracks every 500 process hours using ultrasonic C-scan
Replace immediately if surface pitting exceeds 0.1mm depth
Avoid contact with hydrofluoric acid (HF)

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MAECENAS IACULIS

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