ZYGO ZMI-4004

Technical Specifications
  • Resolution: 0.15 nm
  • Velocity: 2.55 m/sec
  • Number of Axes: 4 axes per board
  • Data Rate: 10 MHz
  • Connection Types: ST fiber optic and HSSDC electrical connections

ZYGO ZMI‑4104C

Product Brief Introduction

Manufactured by ZYGO Corporation (AMETEK Group, USA), this product is the core signal processing unit of ZMI series heterodyne laser displacement interferometer system, exclusively developed for converting interference optical signals from ZYGO laser interferometer sensors into digital displacement data. The board follows global industrial VME64x specification, executes real‑time high‑precision signal demodulation, environmental refractive index compensation and cyclic error correction, outputs standardized digital measurement signals for upper motion control system.