Shop

Product Name: LAM Research 810-072907-005 — RF Matching Network (300 mm, Single-Frequency 13.56 MHz) Product Overview: An automatic RF impedance matching network for single-frequency (13.56 MHz) LAM etch chambers.

Product Name: LAM 810-102361-222 — RF Match Network Assembly Product Overview: High-frequency RF match network module used in semiconductor plasma etch and deposition equipment. The unit provides impedance matching between the RF generator and the process chamber to maximize power transfer efficiency.

Product Name: LAM 810-800081-022 — Showerhead Electrode Assembly Product Overview: Gas distribution showerhead with integrated RF electrode for uniform plasma generation across the wafer surface. Used in high-density plasma etch and PECVD processes.