LAM 810-072907-005

Product Name: LAM Research 810-072907-005 — RF Matching Network (300 mm, Single-Frequency 13.56 MHz)

Product Overview: An automatic RF impedance matching network for single-frequency (13.56 MHz) LAM etch chambers.

Category:
Description

Technical Specifications:

  • Type: Automatic RF Matching Network (Single-Frequency)
  • Frequency: 13.56 MHz
  • Power Rating: 0 ~ 4000 W
  • Impedance Range: 5 ~ 1500 Ω
  • Tuning Speed: < 150 ms
  • VSWR: < 1.2:1 (at match)

Functional Features:

  • Single-frequency automatic tuning — optimized for 13.56 MHz plasma sources
  • Compact design — smaller footprint than dual-frequency variant
  • Built-in arc detection — shuts down within 5 µs of arc event

Performance Parameters:

Parameter Value
Frequency 13.56 MHz
Power Rating 4000 W
Tuning Range 5 ~ 1500 Ω
Tuning Speed < 150 ms
Arc Response Time < 5 µs
Cooling Water-cooled (18°C inlet)

Material Composition:

  • Capacitors: Vacuum variable capacitors
  • Inductors: Air-core copper coils
  • Housing: 304 Stainless Steel
  • Connectors: 50 Ω coaxial (7/16 DIN)

Structural Features:

  • 19-inch rack-mountable (1U height)
  • LCD front panel display
  • RS-232 remote interface

Working Principle: PI-network automatic matching using variable vacuum capacitors. Controller monitors reflected power and adjusts C and L values in real time to maintain VSWR < 1.2:1.

Advantages:

  • Compact 1U form factor saves rack space
  • Fast arc protection prevents chamber damage
  • Lower cost than dual-frequency matching network

Applicable Industries: Semiconductor — Single-frequency etch and PECVD systems

Model Series: LAM 810-072xxx Series — 300 mm Single-Freq Matching Network

Installation Requirements:

  • Mount in 19-inch rack (1U)
  • Connect 50 Ω RF line from generator (max 5 m cable length)
  • Connect water cooling (18°C, 1.5 L/min)
  • Connect RS-232 for recipe integration

Usage Notes:

  • Calibrate quarterly with RF power meter
  • Inspect vacuum capacitor bellows every 12 months
  • Replace entire unit if tuning fails after 3 consecutive attempts
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