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LAM 61-380630-00
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Kollmorgen 60WKS-M24022
Kollmorgen 60WKS-M24022
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Reliance 61C22B
Reliance 61C22B

LAM 61-380630-00

Series: 61-380000 Series

Product Overview:
The LAM 61-380630-00 is a thermal mass flow controller designed for semiconductor process equipment. It precisely controls the flow of process gases (such as N₂, O₂, Ar, CF₄, SF₆, Cl₂) using the thermal dispersion principle. It is used in LAM etching and deposition systems.

Category:
Description

Technical Specifications:

Parameter Value
Model Number 61-380630-00
Gas Type Multi-gas (N₂, O₂, Ar, CF₄, SF₆, Cl₂, etc.)
Flow Range 0 to 5 SLM (Standard Liters per Minute)
Full Scale 5 SLM
Accuracy ±1.0% of full scale
Repeatability ±0.5% of full scale
Response Time < 50 ms (10% to 90%)
Control Signal 0–5V DC analog or RS-485 digital
Setpoint Input 0–5V DC or 4–20 mA
Operating Pressure 0.5 to 10 psig (3.4 to 69 kPa)
Operating Temperature 0°C to 50°C (32°F to 122°F)
Wetted Materials 316L Stainless Steel, Hastelloy C-276
Electrical Connector 15-pin D-sub
Power Supply 24V DC
Power Consumption 3W typical
Dimensions 89mm x 57mm x 102mm (approx.)
Weight 0.6 kg (1.3 lb)

Function Features:

  • Thermal mass flow sensing — no pressure/temperature compensation required
  • Multi-gas capability — pre-calibrated for common process gases
  • Analog + digital control — 0–5V setpoint with RS-485 communication
  • Fast response time under 50 ms for tight process control
  • Corrosion-resistant wetted parts for aggressive chemistry gases
  • LAM proprietary design — OEM part for KLA/LAM etch and deposition tools

Applicable Industries:
Semiconductor manufacturing, thin-film deposition, plasma etching, CVD, PVD.

Installation Requirements:

  • Mount in upright orientation only
  • Use 1/4″ VCR or Swagelok fittings for gas connections
  • Purge lines with N₂ before connecting to process gas
  • Electrical: 24V DC power, shielded cable for analog signals

Usage Notes:

  • Do not exceed 10 psig inlet pressure
  • Calibrate for specific gas type before use
  • Replace filters every 6 months in corrosive gas service
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