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LAM 810-801237-021
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LAM 810-810202-013
LAM 810-810202-013

LAM 810-800082-043

Product Name: LAM 810-800082-043 — Vacuum Robot Blade Assembly

Product Overview:
End-effector blade for the wafer transfer robot used in LAM etch and deposition chambers. The blade is the component that physically contacts and supports the wafer during transfer.

Category:
Description

Technical Specifications:

  • Wafer Size: 200 mm / 300 mm
  • Blade Material: Aluminum Oxide (Al₂O₃) or Silicon Carbide (SiC)
  • Blade Thickness: 1.5 mm – 3.0 mm
  • Number of Blades per Arm: 3 (standard)
  • Lifespan: > 500,000 transfers
  • Particle Generation: < 0.1 particles/transfer > 0.3 μm

Functional Features:

  • Low-outgassing ceramic material
  • Precision-ground edge profile for smooth wafer pickup/placement
  • Integrated lift-pin holes for alignment
  • Compatible with FOUP and cassette interfaces

Performance Parameters:

Parameter Value
Flatness < 10 μm TIR
Edge Chipping None (per ISO 13355)
Weight 45 g per blade (Al₂O₃)
Operating Temperature -20°C to 150°C

Material Composition:

  • Blade: Aluminum Oxide (Al₂O₃), 99.7% purity, sintered
  • Mounting Bracket: Anodized Aluminum 6061-T6
  • Fasteners: Stainless Steel 316L

Structural Features:

  • Rectangular blade with chamfered edges
  • Three-point kinematic mounting for repeatable positioning
  • Color-coded for wafer size identification (blue = 200 mm, black = 300 mm)

Working Principle:
The robot arm positions the blade beneath the wafer in the FOUP or on the chuck. Lift pins raise the wafer onto the blade surface. The robot transports the wafer to the process position and lowers it onto the chuck. The blade retracts and the robot returns to the load position.

Key Advantages:

  • Al₂O₃ ceramic eliminates metal contamination and particle generation
  • Precision-ground edges prevent wafer chipping during transfer

  • 500,000 transfer lifespan reduces consumable cost

Applicable Industries: Semiconductor manufacturing (all front-end processes)

Installation Requirements:

  • Install with torque: 2 N·m ± 0.5 N·m
  • Verify blade flatness with laser interferometer before first use
  • Robot calibration required after blade replacement

Usage Notes:

  • Inspect blade edges under 20× magnification weekly
  • Replace blade immediately if any chip or crack is detected
  • Store spare blades in clean, dry environment (RH < 40%)
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