AMAT 0100-71311

Model Series: Centura / Endura PVD Modules

Product Description:
A pneumatically actuated throttle valve used to control chamber pressure in AMAT physical vapor deposition (PVD) and sputter systems. It regulates gas flow to maintain precise process pressure during thin-film deposition.

Category:
Description

Technical Specifications:

  • Part Number: 0100-71311
  • Valve Type: Pneumatic butterfly valve
  • Orifice Diameter: 150mm
  • Actuation Pressure: 2 to 8 bar (29 to 116 psi)
  • Response Time: <50ms (open to 90%)
  • Pressure Control Range: 1 mTorr to 100 Torr
  • Material: Stainless Steel 316L body, Alumina ceramic seat
  • Leak Rate: <1×10⁻⁹ atm·cc/s (closed position)

Key Features:

  • Ceramic Seat: Alumina seat provides zero wear over 100,000 cycles
  • Fast Actuation: <50ms response enables tight pressure control during process transitions
  • Low Particle Generation: SS 316L body with electropolished finish (Ra < 0.4μm)
  • Fail-Safe Design: Defaults to fully open on loss of pneumatic supply

Applicable Industry: Semiconductor PVD — Copper Seed, Barrier Layer, Aluminum Metallization

Installation Requirements:

  • Connect pneumatic lines with 6mm OD tubing, max length 3m
  • Mount with 4× M6 bolts, torque 6 Nm
  • Perform leak test at 100 Torr with valve fully closed — acceptable leak <1×10⁻⁶ Torr·L/s

Usage Notes:

  • Service actuator seals every 20,000 cycles
  • Replace ceramic seat if leak rate exceeds 1×10⁻⁸ atm·cc/s
  • Do not exceed 8 bar actuation pressure — seat damage occurs above this limit
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