AMAT 0100-76124

Model Series: Centura / Producer Bias Systems

Product Description:
A high-voltage DC power supply module used to generate substrate bias voltage in AMAT plasma etch chambers. It provides precise DC bias control from 0V to -5000V for ion energy control during anisotropic etching.

Category:
Description

Technical Specifications:

  • Part Number: 0100-76124
  • Output Voltage Range: 0 to -5000V DC (adjustable in 1V steps)
  • Output Current Range: 0 to 2A DC
  • Power Rating: 10 kW maximum
  • Ripple: <0.1% of full scale
  • Response Time: <1ms
  • Cooling: Forced air, 40 CFM minimum
  • Efficiency: >92%
  • Input Voltage: 3-phase 480V AC, 60Hz

Key Features:

  • Digital Control: Controlled via AMAT RECIPE software with real-time feedback
  • Arc Detection: Automatic shutdown within 10μs of arc detection
  • Soft Start: Ramp rate programmable from 1V/s to 500V/s
  • Modular Design: Hot-swappable in 3-slot chassis

Applicable Industry: Semiconductor Etch — DRIE, Gate Etch, Contact Etch, Trench Etch

Installation Requirements:

  • Mount in standard 19″ rack, 3U height
  • Connect 3-phase 480V power with dedicated 30A circuit breaker
  • Ground chassis to facility earth with <0.5Ω resistance
  • Minimum 100mm clearance on all sides for airflow

Usage Notes:

  • Calibrate output voltage quarterly using 1000:1 high-voltage probe
  • Replace cooling fan every 12 months or when RPM drops below 3000
  • Do not operate with chassis cover removed — lethal voltage present
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