PFEIFFER EVR116

Product Name: Pfeiffer Vacuum EVR 116 — Electrically Actuated Gas Dosing / Control Valve with Integrated Controller

Product Brief: A precision motor-driven vacuum control valve (also referred to as Electronic Valve Regulator) with integrated stepper-motor controller. Used for fine regulation of gas flow or pressure in high/ultra-high vacuum systems. Communicates via analog 0–10 V or serial (RS-232/RS-485) interface.

Category: Others

Description

Technical Specifications:

Part No. Reference: I39 931 A (Pfeiffer catalog)
Connection Flange: DN 16 ISO-KF
Control Modes:
- Analog mode:Valve position set by 0–10 V DC between control terminals (≈0 V = closed, ≈9 V = fully open)
- Digital mode:Position commanded via serial interface (RS-232/optional RS-485) using Pfeiffer command language
Flow Range (Air): Min ≈ 5×10⁻⁶ mbar·l/s ; Max ≈ 1000–1250 mbar·l/s (depends on upstream pressure & filter)
Operating Pressure: Min 1×10⁻⁸ mbar ; Max 2.5 bar (abs)
Helium Leak Rate: ≤ 1×10⁻⁹ mbar·l/s
Supply Voltage: 24 VDC (±10 %)
Power Consumption: Max 12 VA; typical 500 mA peak, 20–30 mA idle
Open/Close Time: Open ≈ 4 s, Close ≈ 3 s (full stroke)
Valve Stroke: 11.5 mm
Materials: Body & needle — stainless steel 1.4435 / 1.4301; seals — FPM (Viton®) standard; optional metal seals for UHV
Bake-out Temp: Actuator max 60 °C; Valve body max 80 °C
Ambient Temp: +5 to +40 °C
Weight: ≈ 0.5–0.75 kg
Protection: IP40

Features:

Position feedback via serial query (actual position in steps or percent)
Status LEDs for open/close/运动中
Integrated end-switch (light barrier) detection for full-open / full-close

Application: Mass spectrometer inlet control, vacuum coating chamber pressure regulation, R&D vacuum systems, leak detection stations.

Installation Notes:

Mount with flange axis vertical or horizontal per system design; avoid mechanical stress on KF clamp.
Use clean, particle-free piping; install inlet filter if process gas contains particulates.
For UHV, specify metal-sealed version and observe bake-out temperature limits of actuator (disconnect during bake if >60 °C).

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