AMAT 0190-37684

Product Series: Applied Materials Centura / Producer Etch Systems

Product Introduction:
The 0190-37684 is a pneumatic throttle valve used in AMAT semiconductor process chambers. It controls the chamber pressure by adjusting the conductance between the chamber and the throttle pump, enabling precise pressure control from 1 mTorr to 100 Torr.

Category: Others

Description

Technical Specifications:

Parameter	Value
Valve Type	Pneumatic butterfly / gate valve
Pressure Range	1 mTorr – 100 Torr
Response Time	< 50 ms (open to close)
Actuator	Pneumatic (N₂, 60 psi supply)
Material	316L Stainless Steel body, Alumina ceramic seat
Leak Rate (Closed)	< 1 × 10⁻⁷ Torr·L/s
Orifice Diameter	50–150 mm (chamber-size dependent)
Control Signal	0–10 V DC / 4–20 mA
Cycle Life	> 10 million cycles

Material Composition:

Body: 316L Stainless Steel (electropolished)
Seat: Alumina (Al₂O₃) ceramic
Disc: 316L SS with PEEK coating
Actuator Diaphragm: EPDM rubber
Pneumatic Fittings: 316L SS VCR

Structure Features:

Inline design between chamber and throttle pump
Pneumatic actuator with position feedback (LVDT)
Ceramic seat for leak-tight closure
Purge port for N₂ backfill during maintenance

Working Principle:
A 4–20 mA or 0–10 V signal from the chamber controller commands the valve position. The pneumatic actuator moves a butterfly or gate disc, adjusting the aperture area. This controls the gas flow rate (Q = C × ΔP), where C is conductance and ΔP is the pressure differential. A feedback sensor confirms actual position.

Advantages & Highlights:

< 50 ms response — enables tight pressure control loops
Ceramic seat — ultra-low leak rate, long life
10 million cycle life — minimal PM frequency
Pneumatic actuation — intrinsically safe (no sparks in chamber area)

Applicable Industries:

Semiconductor Etch (pressure-sensitive processes)
PECVD
ALD (Atomic Layer Deposition)

Installation Requirements:

Install between chamber and throttle pump with short, straight tubing
Supply clean N₂ at 60 ± 5 psi to actuator
Connect control signal (4–20 mA or 0–10 V) from chamber controller
Verify full open/close travel with control signal sweep

Usage Precautions:

Do not use compressed air — moisture will damage actuator diaphragm (use dry N₂ only)
Do not exceed 100 Torr differential pressure across closed valve
Inspect ceramic seat every 12 months for erosion
Replace actuator diaphragm every 24 months

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