AMAT 0100‑00003

Technical Specifications

• Input Power: 24 VDC nominal, 32 VDC absolute maximum
• Motor Drive Current: Adjustable 1.5 A‑3 A phase current
• Control Signal Interface: Pulse‑plus‑direction digital control input
• Max Pulse Input Frequency: 200 kHz
• Micro‑step Setting: 1‑256 selectable micro‑step resolution
• Operating Temperature: 0 °C ~ +60 °C
• Dimensions: 146 mm × 112 mm × 38 mm
• Weight: 0.48 kg Function Features
• Fine micro‑step control reduces motor mechanical vibration during high‑precision wafer transport
• Multi‑layer hardware protection: over‑current, over‑voltage, under‑voltage and motor open‑circuit detection
• Direct drop‑in replacement for original equipment without host controller logic modification
• Optimized thermal design for continuous operation inside vacuum tool electronics bay
• Status LED indicators for fault diagnosis and runtime condition monitoring
• Application Scenarios: AMAT Endura PVD semiconductor cluster tools; wafer transfer robotic manipulators; precision semiconductor substrate positioning stages; vacuum chamber substrate shuttle mechanisms.
• Performance Parameters: Minimum effective step resolution 0.09°; position repeatability matched to sub‑micron mechanical stage requirements; current regulation accuracy ±5 %; fault signal output to tool host PLC system.
• Material Composition: High‑temperature FR‑4 printed circuit board; industrial power MOSFET power devices; gold‑plated edge connectors for rack insertion; aluminium passive heat sink assembly.
• Structural Characteristics: Standard card‑style plug‑in module form factor for instrument rack mounting; edge‑connector back‑plane interface; vertical orientation for natural convection cooling.
• Working Principle: Host controller sends pulse‑direction motion commands; module converts digital pulse sequence into multi‑phase variable‑current drive waveforms for stepper motor windings; closed‑loop current regulation maintains stable motor torque across varying operating speed.
• Installation Requirements: Install inside tool climate‑controlled electronics cabinet; maintain specified airflow cooling clearance around module surface; torque connector terminals to manufacturer‑defined torque value; strictly match motor phase wiring assignment.