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AMAT 0100-76124
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Aps 100-1551-54
Aps 100-1551-54

AMAT 0100-77037

Model Series: HiPace Series Equivalent

Product Description:
A high-capacity turbomolecular vacuum pump used in AMAT cluster tools and standalone process chambers. It achieves high vacuum and ultra-high vacuum conditions required for sputtering, CVD, and etch processes.

Category:
Description

Technical Specifications:

  • Part Number: 0100-77037
  • Pumping Speed (N₂): 1200 L/s
  • Ultimate Pressure: 5×10⁻¹⁰ Torr (with N₂)
  • Inlet Flange: ISO-K 250
  • Rotor Speed: 42,000 RPM
  • Bearing Type: Active magnetic bearing (oil-free)
  • Motor Power: 1.2 kW
  • Noise Level: 68 dB(A)
  • Operating Temperature: 5°C to 40°C
  • Exhaust Connection: DN 63 ISO-K

Key Features:

  • Magnetic Bearing: Zero oil contamination — eliminates backstreaming risk
  • Vibration Isolated: Active damping reduces transmitted vibration to <0.01mm/s
  • Built-In Controller: Integrated drive electronics with RS-485 communication
  • Auto-Restart: Automatically restarts after power failure

Applicable Industry: Semiconductor Manufacturing — PVD, CVD, Etch, Ion Implant

Installation Requirements:

  • Mount with vibration isolators rated for 50kg
  • Connect exhaust to roughing pump capable of 50 m³/h minimum
  • Orient vertically — tolerance ±5° from vertical
  • Bake at 150°C for 24 hours before first use (new installation)

Usage Notes:

  • Replace bearings every 40,000 hours of operation
  • Monitor rotor temperature — shutdown at 85°C
  • Do not vent chamber with pump running — rotor damage occurs
  • Foreline pressure must remain below 1×10⁻² Torr at all times
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