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AMAT 0100-77037
AMAT 0100-77037
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Schneider 140XBP01000
Schneider 140XBP01000

Aps 100-1551-54

Manufacturer: Advanced Energy (AE) / APS Division
Model Series: MDX Series

Product Description:
A high-power DC power supply designed for industrial plasma and sputtering applications. It delivers stable DC output for magnetron sputtering, PECVD, and plasma-assisted deposition processes.

Category:
Description

Technical Specifications:

  • Part Number: 100-1551-54
  • Output Voltage: 0 to 1500V DC
  • Output Current: 0 to 80A DC
  • Power Rating: 120 kW maximum
  • Ripple & Noise: <0.05% rms
  • Voltage Regulation: ±0.01% of setpoint
  • Current Regulation: ±0.02% of setpoint
  • Response Time: <200μs
  • Cooling: Closed-loop water cooling, 10 L/min, 25°C inlet
  • Input: 3-phase 480V AC, 60Hz, 200A
  • Efficiency: >94%

Key Features:

  • Digital Architecture: FPGA-based control with 16-bit resolution
  • Multi-Mode Operation: Constant Voltage, Constant Current, Constant Power
  • Arc Protection: Detection in <5μs, full shutdown in <50μs
  • Remote Monitoring: Ethernet/IP and RS-485 interface

Applicable Industry: Semiconductor, Display (OLED/LCD), Solar Cell Manufacturing, Coating

Installation Requirements:

  • Install in climate-controlled room, 20°C ±5°C
  • Connect 3-phase 480V with dedicated 200A breaker
  • Water cooling loop: 10 L/min, 25°C inlet, max ΔT 8°C
  • Ground resistance: <0.1Ω to facility earth

Usage Notes:

  • Perform output calibration every 6 months
  • Replace water filter every 3 months
  • Do not exceed 80A continuous — derate to 64A at ambient >35°C
  • Store at 0V output when not in use
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