ZYGO 4205

Product Brief Introduction

• ZYGO 4205 is a factory-calibrated Fizeau-type laser interferometer independently developed by ZYGO Corporation (USA), designed for quantitative non-contact precision inspection of flat, spherical, cylindrical optical component surface figure error, surface irregularity and curvature radius value.
• The whole system integrates solid-state stabilized laser source, precision Fizeau reference optical assembly, piezoelectric phase-shift actuator, industrial high-definition CCD image acquisition module and dedicated MetroPro measurement analysis software, realizing full-automatic fringe collection, phase demodulation and 3D surface topography reconstruction within fixed measuring cycle.
• This model belongs to ZYGO classic fixed-aperture bench interferometer product line, mass-produced for laboratory calibration workshop and optical component batch incoming inspection since official release, fully compliant with international optical metrology standard specifications.

3. Technical Specification

• Effective clear measuring aperture: 4 inches / 101.6 mm (fixed standard caliber, no optional aperture modification)
• Built-in laser central wavelength: 632.8 nm (He-Ne stabilized red laser)
• Laser power rating: ≤0.95 mW, Class II laser grade complying with ANSI Z136.1 & FDA 21CFR radiation standard
• Built-in zoom magnification range: Continuous adjustable 1X~6X fixed optical zoom structure
• System phase-shift driving unit: PZT piezoelectric ceramic phase shifter with full closed-loop control, single-step minimum displacement: 0.1 nm
• Core image sensor parameter: 1280×1024 industrial grade monochrome CCD detector, pixel dimension: 4.65 μm×4.65 μm, fixed sampling frame rate: 30 fps
• System standard data output interface: Gigabit Ethernet + USB3.0 dual data transmission channel
• Operating input voltage: AC 100V~240V, 50/60Hz, rated power consumption: 185W (whole set system including host & control unit)
• Standard measurement environmental temperature range: 20℃±0.5℃; allowable working ambient humidity: 30%~60% RH non-condensing

4. Functional Features

1. Fixed Fizeau common optical path design, single optical path completes reference beam and test beam splitting without extra beam splitter accessory, reducing system wavefront introduction errorZYGO.
2. Built-in SureScan anti-vibration measurement algorithm, realizing stable effective fringe collection under production workshop low-frequency micro-vibration environment without extra heavy anti-vibration platform mandatory matching.
3. Integrated automatic fringe alignment mode; one-key crosshair centering function via front panel control knob for rapid optical path calibration within 120 seconds maximum.
4. Full set measurement parameter automatic calculation: PV peak-valley value, RMS root mean square surface deviation, power spectral density, irregularity and curvature radius numerical output, fully matching ISO10110 optical drawing annotation specification.
5. Dedicated MetroPro embedded software supports custom measurement recipe storage; saved test programs can be synchronized to multiple ZYGO metrology equipment for unified batch inspection standardization.
6. Beam attenuation mechanical knob preset on host front panel; pull-out structure fully blocks laser output for safe equipment maintenance operation.
7. Compatible transmission reference flat/sphere accessory mounting interface, supports both transmission-type and reflection-type dual measurement mode switching via mechanical fixture replacement.
8. Automatic Z-axis objective limit protection program preset inside motion control chip; hardware travel limit switch prevents optical component collision damage during manual adjustment.

5. Performance Parameter

• Minimum detectable surface figure error resolution: 0.001λ (λ=632.8nm)
• System inherent reference flat surface RMS precision: ≤λ/20 @632.8nm
• Full-aperture measurement repeatability error: ≤λ/50 for flat standard sample continuous 20 times repeated test
• Single full-aperture data acquisition completion time: fixed 2.8 seconds per test cycle
• Maximum measurable workpiece curvature radius range: 25mm ~ Infinity (plane), matching optional standard reference sphere set
• Valid measuring working distance between test piece and reference optical surface: 12mm ~75mm adjustable via mechanical lifting stage
• System long-term drift value under constant temperature environment: ≤λ/10 per 8 continuous working hours
• Measurement result export format: RAW original interference file, CSV parameter table, BMP fringe image, PDF formal inspection report four fixed file formats

6. Material Composition

Host Cabinet & Mechanical Frame

• Main outer cabinet shell: High-density die-cast aluminum alloy with matte black anti-corrosion electrophoretic coating, surface hardness HV120; internal support framework adopts cast iron vibration-damping base material to restrain internal mechanical resonance.

Core Optical Components

• Built-in Fizeau reference substrate: Ultra-low expansion ZERODUR glass base; reference working surface single-layer anti-reflection + high-reflection composite optical film coatingZYGO.
• Internal collimation lens group: Fused silica high-purity quartz glass raw material, precision grinding and super-polishing processing technology.

Electrical & Motion Parts

• PZT phase-shift ceramic component: Lead zirconate titanate high-stability piezoelectric crystal material with nickel-plated metal electrode layer; internal circuit PCB adopts FR-4 fire-resistant substrate with gold-plated signal pins.
• Built-in laser resonant cavity housing: Oxygen-free copper heat conduction sleeve for constant temperature laser stabilization control.

Standard Matching Accessories Material

• Test piece fixture base: SUS304 stainless steel with hard anodizing treatment; clamping spring component: beryllium bronze elastic alloy.

7. Structural Characteristics

1. Overall split three-section modular structure: laser emission cavity module, Fizeau interference optical main body module, CCD image acquisition rear module; each module uses precision positioning pin + anti-looseness screw fixed connection for disassembly maintenance convenience.
2. Front panel centralized operation layout: laser power indicator lamp, beam attenuation switch knob, zoom adjustment handwheel, alignment control dial four core operating parts arranged in fixed partition area of host front side.
3. Bottom of main unit reserved four adjustable leveling foot screws (±15mm vertical stroke) for host horizontal calibration on installation platform; foot pad bottom with silicone anti-slip damping cushion structure.
4. Independent sealed dustproof optical cabin design for internal optical path; all lens assembly installed inside nitrogen-filled closed cabin to avoid dust and moisture erosion on coating surface.
5. External accessory bayonet fixed on host lower front side, unified standard interface for quick plug-in of transmission reference flat, reference sphere and customized special fixture without extra tool locking.
6. Rear panel centralized wiring layout: power input socket, Ethernet communication port, USB data port, external trigger signal interface partition fixed arrangement with dustproof rubber blocking cap for idle ports.

8. Working Principle

1. Stabilized He-Ne laser outputs monochromatic coherent light at fixed 632.8nm wavelength; collimation lens converts divergent laser beam into parallel uniform collimated beam entering Fizeau reference optical assemblyZYGO.
2. Incident parallel beam is divided into two independent optical paths at Fizeau reference surface: reference beam reflected back along original optical path by reference high-reflection film; transmission beam penetrates reference substrate to irradiate tested optical workpiece surface, reflected by workpiece surface forming test beam returning to reference optical assembly again.
3. Reference beam and test beam converge inside optical cabin, generating stable alternating light-dark interference fringe due to optical path difference caused by tested workpiece surface height fluctuationZYGO.
4. Built-in PZT phase shifter drives reference surface to perform fixed-step axial scanning perpendicular to optical axis, continuously changing two-beam optical path difference to form phase-shifted serial interference patterns captured by high-precision CCD sensor frame by frame.
5. Captured original fringe image transmits to upper computer via Gigabit Ethernet; MetroPro software completes phase unwrapping calculation, converts phase difference data into corresponding surface height coordinate value, reconstructs full-aperture 3D surface topography and automatically calculates PV, RMS and other standard metrology parameters to finish inspection output.

9. Advantage Highlights

1. Fixed 4-inch standard aperture realizes higher full-aperture measurement consistency compared with variable-aperture multi-caliber interferometer, eliminating aperture switching introduced assembly error source.
2. Integrated Fizeau common-path optical architecture effectively offsets environmental air turbulence and temperature tiny fluctuation interference, realizing stable measuring result without strict ultra-clean constant-temperature laboratory mandatory arrangementZYGO.
3. Factory pre-calibrated reference optical surface, no regular periodic re-calibration required within 5 years under standard storage condition to reduce later maintenance cost.
4. Embedded SureScan anti-vibration algorithm expands applicable site range; equipment can be deployed directly beside CNC optical grinding machine for online incoming inspection without customized large anti-vibration foundation construction.
5. All core optical components pass ZYGO factory 100% full-aperture wavefront inspection before assembly, finished whole machine factory test report attached with each unit for traceable quality archiving.
6. MetroPro official licensed software pre-installed on matched control computer, unlimited measurement data storage and report export without extra annual software authorization expense.
7. Compact overall bench-type volume saves workshop placement space; single operator completes full operation including sample loading, alignment, testing and report derivation independently without auxiliary staff matching.

10. Applicable Industries

• Precision Optics Manufacturing Industry: Spherical/plane lens, optical window, prism, optical filter batch surface quality inspection after polishing and coating processing.
• Semiconductor Optoelectronic Industry: Wafer optical coating surface flatness detection, lithography objective lens component sub-assembly wavefront calibration, VCSEL packaging optical window metrology.
• Aerospace Precision Component Industry: Aircraft inertial navigation optical part, space remote sensing optical element incoming inspection and finished product quality verification.
• Scientific Research & University Laboratory: Optics teaching experiment, surface physics microstructure research, new optical material surface characteristic test.
• Medical Optics Industry: Intraocular lens, endoscope objective lens, ophthalmic optical component production quality control inspection.
• Laser Equipment Manufacturing Industry: Laser resonant cavity window, laser collimation lens, high-power laser output mirror surface figure precision measurement.

11. Model Series Classification

• Base standard model: ZYGO 4205 (original factory standard configuration: 4-inch host + basic MetroPro software + standard reflection fixture set)
• Optional derivative sub-model 1: ZYGO 4205-T (equipped with full set transmission reference flat/sphere accessory kit for transmission optical component dedicated measurement)
• Optional derivative sub-model 2: ZYGO 4205-A (add automatic X/Y motorized displacement stage for batch workpiece automatic loading inspection)
• Optional derivative sub-model 3: ZYGO 4205-H (high-temperature customized version with internal constant-temperature optical cabin for high-low temperature environment laboratory application)

12. Installation Requirements

1. Site foundation requirement: Install on solid concrete ground platform; ground flatness error of placement position ≤0.5mm per meter; avoid installation position above building floor beam gap and ventilation duct vibration source area.
2. Environmental precondition: Installation ambient temperature stabilized at 20℃±1℃ continuously for minimum 24 hours before equipment unpacking placement; indoor air relative humidity controlled between 35%~55% RH without condensation dew phenomenon.
3. Power supply installation standard: Independent single-phase AC power supply socket exclusively for equipment use, grounding resistance of power grounding terminal ≤4Ω; prohibit sharing power socket with high-power motor, air compressor and other impulse load equipment.
4. Host leveling installation: After placing main unit on installation platform, adjust four bottom leveling foot screws sequentially via level gauge until host horizontal error ≤0.02mm/m; lock foot screw anti-looseness nut after leveling completion.
5. Optical accessory installation rule: Hold only metal edge of reference flat/sphere accessory during mounting, prohibit direct finger contact with optical working surface; insert accessory positioning pin into host bayonet slot then clockwise tighten fixing locking knob until mechanical click locking feedback occurs.
6. Software installation specification: Install matched MetroPro official software on dedicated industrial control computer with Windows10 64-bit professional system; complete equipment host-computer Ethernet fixed IP address matching and communication debugging before formal measurement startup.
7. Post-installation pre-operation: Power on equipment and keep continuous preheating 90 minutes for laser source stabilization before formal measurement calibration and sample testing.

13. Usage Precautions

1. Laser safety regulation: Strictly prohibit naked eye direct observation of output laser beam and strong reflected laser spot; wear professional laser protective goggles during long-term continuous equipment debugging operation; cut off laser output via front panel beam attenuation knob during equipment internal maintenance.
2. Optical component protection: All reference lens and tested workpiece optical surface can only be cleaned by factory-specified lint-free optical cloth soaked with anhydrous isopropanol; any other cleaning liquid and common tissue paper are forbidden to wipe optical coating surface; avoid hard object scratch impact on optical working surface at all times.
3. Z-axis motion safety: Always lift objective assembly to highest Z-axis limit position before loading thick oversized workpiece; start measurement from lowest magnification (1X) gradually switching to high magnification to prevent objective collision with test piece surface damage.
4. Environmental daily management: Close equipment cabin dustproof cover when equipment standby not in use; keep indoor environment away from volatile acid-base corrosive gas and large amount floating dust to prevent internal optical component coating corrosion failure.
5. Electrical operation specification: Cut off main power supply before equipment cabinet internal circuit maintenance; prohibit plugging/unplugging communication cable when host power supply is switched on to avoid signal board chip burnout damage.
6. Data management rule: Export daily finished measurement original RAW file and test report to backup storage disk on the same working day; prohibit direct modification of original measurement data inside MetroPro software to ensure inspection data traceability compliance.
7. Abnormal fault disposal: Immediately press host emergency stop button once abnormal fringe distortion, abnormal mechanical noise or laser flicker occurs during measurement; record detailed fault phenomenon and contact official ZYGO after-sales engineer for maintenance; unauthorized host disassembly and internal parameter modification are strictly forbidden.
8. Long-term idle storage: If equipment stops working continuously over 30 days, cut off total power supply, clean all optical components, place desiccant inside optical cabin and seal whole equipment with dustproof covering cloth, store under constant temperature dry indoor environment.