ZYGO ZMI-4104

Product Name:​ ZMI-4104 Displacement Measuring Interferometer Electronics Board
Product Introduction:​ 6U VME64x measurement board in ZYGO ZMI™ interferometer family. Decodes optical signals from ZYGO HeNe laser heads (7702/7714/7724) into sub-nanometer displacement on 4 axes.
Technical Specifications:
  • Board Format: 6U VME64x
Category:
Description
  • Axes per Board: 4
  • Minimum Optical Power: 0.07 µW
  • Position Resolution: 0.15 nm
  • Max Velocity: ±2.55 m/s (dual-pass interferometer)
  • Accuracy at Max Velocity (σ): 0.2 nm
  • Periodic Error Compensation: Yes (Cyclic Error Correction)
  • Expansion: Multiple boards in VME chassis up to 64 axes
  • Compatible Lasers: ZYGO 7702, 7714, 7724
    Functional Features:​ Patented CEC nonlinear error correction, sub-nm linearity, high-speed Doppler processing, VME host integration.
    Application Scenes:​ Lithography stage metrology, wafer inspection, optical component alignment, nanometrology research, precision CNC feedback.
    Installation Notes:​ Install in 6U VME64x crate with ZYGO laser source and interferometer optics; avoid beam path vibration.
    Precautions:​ Maintain laser warm-up; clean fiber/optical ends; thermal expansion of optics still applies—compensate externally.
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