VAT 65040-PACV-AYU2

Product Name

Pendulum Control & Isolation Valve

Product Description

The VAT 65040-PACV-AYU2 is a high-precision pendulum-style vacuum control and isolation valve designed for semiconductor and industrial vacuum process systems.

Category:
Description
Technical Specifications
  • Pressure Range: 1e-8 mbar to 1.2 bar absolute
  • Maximum Differential Pressure (closed): 1.2 bar
  • Maximum Seat Pressure (opening): 0.03 bar
  • Molecular Flow Conductance: 1700 l/s
  • Actuator: Stepper motor with encoder position feedback
  • Body Material: Hard anodized aluminum alloy
  • Flange Standard: ISO-F compatible with ISO 1609
  • Maximum Body Temperature: 120 °C (bake-out compatible)
  • Power Supply: 24 VDC, maximum 100 mA
  • Protection Rating: IP65
  • Interface: RS-485 with integrated pressure controller
Functional Features
  • Pendulum plate throttling mechanism delivers particle-free, shock-free operation
  • Integrated closed-loop pressure controller with stepper motor actuation
  • Spring-loaded sealing ring provides leak-tight vacuum isolation
  • Pneumatic seal lift sequence eliminates sliding friction during opening
  • Bake-out compatible design supports high-temperature system degassing
  • Ultra-fast control response for dynamic pressure regulation
Application Scenarios
  • Semiconductor wafer processing vacuum systems
  • Thin film deposition and etching processes
  • Vacuum coating and surface treatment equipment
  • Research laboratory vacuum chambers
  • Pharmaceutical and biotech vacuum processing
Performance Parameters
  • Pressure control accuracy: ±0.5% of setpoint
  • Step response time: <100 ms
  • Leak rate: <1e-9 mbar·l/s
  • Positioning repeatability: ±0.1° of plate angle
Material Composition
  • Valve body: Hard anodized aluminum alloy
  • Sealing elements: Fluoroelastomer (FKM)
  • Pendulum plate: Anodized aluminum
  • Actuator housing: Die-cast aluminum
  • Shaft seals: Perfluoroelastomer (FFKM)
Structural Features
  • Compact in-line design with ISO-F flanges
  • Integrated controller and actuator assembly
  • Rotary feed-through seals for pendulum shaft
  • Service access port for maintenance
Working Principle

The pendulum plate functions as a variable throttling element, adjusting flow conductance through rotational motion. The integrated controller calculates the required plate angle to achieve the target pressure setpoint. A stepper motor positions the pendulum plate, with an encoder providing precise position feedback for closed-loop control. For isolation duty, spring force presses the sealing ring downward against the pendulum plate to create a leak-tight metal seal. For control operation, the sealing ring lifts pneumatically first, then the pendulum plate rotates to adjust flow area. This sequence eliminates particle generation from sliding friction.

Installation Requirements
  • Install in horizontal orientation with actuator assembly on top
  • Connect vacuum flanges with compatible metal seals
  • Supply 24 VDC power and RS-485 communication cable
  • Connect pneumatic supply for sealing ring actuation
  • Maintain minimum clearance for service access
Usage Notes
  • Do not exceed maximum differential pressure rating
  • Bake-out temperature must not exceed 120 °C
  • Perform periodic leak testing to verify sealing integrity
  • Avoid mechanical shock to the stepper motor and encoder assembly
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