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MKS 220DD-00100A2B
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VIBRO-METER 200-566-000-112
VIBRO-METER 200-566-000-112
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CMT 288SP-OB-25-D
CMT 288SP-OB-25-D

MKS 220DD-00100A2B

Series: 220D Baratron

Product Introduction:
The MKS 220DD-00100A2B is a high-accuracy capacitance manometer (Baratron) designed for absolute pressure measurement in semiconductor, vacuum, and process control applications. It uses a capacitance diaphragm as the primary sensing element.

Category:
Description

Technical Specifications:

Parameter Value
Measurement Type Absolute Pressure
Pressure Range 0 – 100 Torr (13.33 mbar)
Accuracy ±0.25% of Reading
Output Signal 0–5 VDC / 0–10 VDC / 4–20 mA (selectable via suffix)
Operating Temperature 0°C to +50°C
Process Connection 1/4″ NPT Male
Housing Material 316L Stainless Steel
Electrical Connection 8-pin DIN connector
Supply Voltage 15–30 VDC
Response Time < 5 ms (typical)
Overpressure Rating 2x full scale
Weight Approx. 280 g

Functional Features:

  • Capacitance diaphragm sensor — no oil, no contamination risk
  • Digital temperature compensation — maintains accuracy across operating range
  • Multiple output options — voltage or current, configurable at order
  • Zero-drift stable — < 0.05% FS per year
  • Clean-room compatible — low outgassing materials

Applicable Industries:
Semiconductor Manufacturing, Vacuum Coating, Thin Film Deposition, Analytical Instrumentation, R&D Laboratories

Installation Requirements:

  • Mount with process connection pointing downward (gas service) or upward (liquid service)
  • Use clean, dry, particle-free tubing (stainless steel or PTFE)
  • Purge line before connecting to process

Usage Notes:

  • Do not exceed 200 Torr (2x FS) overpressure
  • Recalibrate annually per ISO 17025 standards
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