LAM 605-108114-003

Technical Specifications:

• Part Number: 605-108114-003
• Coating Material: Yttria-Stabilized Zirconia (YSZ), typically 8% Y₂O₃-ZrO₂
• Coating Thickness: 150–300 μm (typ.)
• Base Material: 6061-T6 Aluminum Alloy
• Bore Diameter: Multiple precision orifices, 0.5–1.5 mm range
• Surface Finish: Ra ≤ 0.8 μm (machined), Ra ≤ 1.6 μm (coated)
• Operating Temperature: Up to 350°C continuous
• Compatible Reactors: LAM 2300, Flex, Polygon, SPE, TEL (legacy) etch platforms

Functional Features:

• Uniform gas distribution across 200mm/300mm wafers
• Silicon-coated surface resists fluorine-based plasma attack
• Precision-drilled orifice array ensures laminar flow
• Replaceable consumable with defined service life

Performance Parameters:

• Gas Flow Uniformity: ≤ ±3% across wafer surface
• Plasma Erosion Rate: < 0.5 μm/hour (with YSZ coating)
• Service Life: 80–150 process hours (depending on recipe)
• Particle Generation: < 10 particles/cm² (post-coating)

Material Composition:

Structural Features:

• Circular disc geometry with radial gas channel
• Multi-zone orifice pattern for uniformity
• O-ring groove for chamber seal
• Coating applied via plasma spray (APS) process

Working Principle:
Process gas enters the shower head through a central inlet, flows through precision-machined internal channels, and exits through a uniformly distributed array of orifices onto the wafer surface. The YSZ coating acts as a barrier against reactive plasma species, preventing aluminum corrosion and particulate contamination.

Key Advantages:

• Extended component lifetime vs. uncoated aluminum
• Reduced particle contamination in etch process
• Consistent etch uniformity across wafer
• KLA-certified OEM quality

Applicable Industries:

• Semiconductor Manufacturing (Front-End Wafer Fabrication)
• MEMS Fabrication
• Advanced Packaging

Installation Requirements:

• Install in cleanroom environment (ISO Class 5 or better)
• Torque mounting bolts to 5–7 N·m per manufacturer spec
• Verify O-ring seating before chamber pump-down
• Perform leak check at 10⁻⁶ Torr·L/s maximum

Usage Precautions:

• Do not exceed 350°C operating temperature
• Replace after defined service hours regardless of visual condition
• Handle with ESD-safe gloves; coating is brittle under impact
• Store in sealed, dry nitrogen-purged container