KLA-Tencor 2114B-30SLT

Product Name: KLA-Tencor 2114B-30SLT (Surfscan SP1 System – 300mm Wafer Inspection)

Product Introduction: The 2114B-30SLT is a surface inspection system from KLA-Tencor’s Surfscan SP1 product family. The “30SLT” designation indicates a 300mm wafer, single-laser, through-the-lens configuration. It performs automated defect inspection on bare and patterned wafers.

Category:
Description

Model Series: Surfscan SP1 2114B Series

Technical Specifications:

  • Wafer Size: 300mm (12-inch)
  • Laser TypeSingle UV Laser (355nm or 266nm)
  • Inspection Mode: Brightfield + Darkfield
  • Throughput: Up to 120 wafers/hour (depending on recipe)
  • Defect Sensitivity: Detects particles ≥ 0.08 μm (brightfield), ≥ 0.05 μm (darkfield)
  • Resolution: 0.1 μm spatial resolution
  • Wafer Handling: Robotic arm, FOUP/Cassette compatible
  • Software: KLA Insight™ software platform
  • Power: 100-240 VAC, 50/60 Hz
  • Footprint: Approximately 1.2m x 1.5m

Functional Features:

  • Dual-mode inspection: Bare wafer + patterned wafer
  • Automatic defect classification: Particle, scratch, pit, pattern defect
  • Auto-recipe optimization
  • Run-to-run control integration
  • SECS/GEM compatibility

Performance Parameters:

  • False Defect Rate: < 2% (with optimized recipe)
  • Capture Rate: > 95% for defects ≥ 0.1 μm
  • Repeatability: ± 0.01 μm (CD measurement)

Structure: Optical head with UV laser, high-NA objective lens, CCD/TDI camera, wafer stage with X-Y-θ-Z motion control

Applicable Industries: Semiconductor Manufacturing, MEMS, LED, Solar Cell Production

Installation Requirements: Cleanroom environment (Class 100 or better), vibration-isolated floor, 208/240VAC 3-phase power, chilled water for laser cooling, exhaust for ozone management

Usage Notes: UV laser requires interlock safety system. Operators must wear UV-rated safety goggles. Regular calibration with NIST-traceable standards required every 6 months.

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