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Leybold TURBOVAC50

Product Name: Turbomolecular Vacuum Pump Product Introduction: TURBOVAC50 is an oil-lubricated bearing turbomolecular pump produced by Leybold, designed to generate high vacuum and ultra-high vacuum environments. It adopts classic turbine rotor structure, featuring stable pumping performance and compact body for laboratory and industrial high vacuum systems.
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Description

Technical Specifications Pumping speed for nitrogen: 50 l/s Ultimate pressure: less than 5 × 10⁻⁸ mbar High vacuum inlet flange: DN40 KF Forevacuum port: DN16 KF Rated rotational speed: 51000 rpm Power consumption: 80 W Operating temperature range: 10 °C ~ 40 °C

Functional Features Adopt grease lubricated bearing structure, simple maintenance. High compression ratio for light gas such as hydrogen and helium. Low vibration and low noise during steady operation. Integrated monitoring interface for speed and temperature status.

Application Scenarios Surface analysis instruments, mass spectrometers, electron microscopes, vacuum coating equipment, leak detectors, semiconductor research vacuum chambers.

Material Composition Pump housing: Aluminum alloy Rotor and stator blades: High-strength aluminum alloy Sealing elements: Fluorine rubber O-ring

Structural Characteristics Multi-stage turbine rotor and stator stacked structure. Separate high-vacuum port and forevacuum port layout. Built-in speed sensor and temperature sensor.

Working Principle High-speed rotating turbine blades transfer momentum to gas molecules, pushing gas from high vacuum side to forevacuum side, and the backing pump discharges the gas to atmosphere, achieving high vacuum pumping.

Installation Requirements Install vertically, avoid long-term horizontal installation. Match suitable backing vacuum pump with enough pumping capacity. Keep the installation space for heat dissipation. Use specified KF flange and O-ring for sealing.

Usage Notes Do not start the pump without forevacuum. Avoid sudden pressure burst into the vacuum chamber during operation. Regularly check bearing grease and replace grease according to service cycle. Prevent solid particles and condensable vapor entering pump cavity.

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