BALZERS IKR020

Technical Specifications

• Measurement principle: Inverted magnetron cold cathode ionization
• Measuring range: 1×10⁻² mbar to 1×10⁻⁹ mbar
• Mounting flange: KF (NW25) standard vacuum flange
• Operating temperature (ambient): +5°C to +45°C
• Bakeout temperature (sensor only): Up to 150°C (without cable)
• Power supply: Powered by dedicated gauge controller, no direct mains connection
• Material (wetted parts): Stainless steel 304, ceramic-metal seal
• Certification: CE, RoHS compliant

Functional Features

• No hot filament, robust against gas bursts and process contamination
• Long service life with minimal consumable parts
• Fast response to vacuum pressure changes
• Stable measurement performance in high vacuum range
• Compatible with standard Balzers vacuum gauge controllers
• Easy installation via standard KF flange connection

Application Scenarios

• Physical vapor deposition (PVD) and chemical vapor deposition (CVD) systems
• Vacuum coating and surface treatment equipment
• Electron microscopy and surface analysis instruments
• Ultra-high vacuum system pressure monitoring
• Semiconductor manufacturing vacuum process control
• Research laboratory vacuum systems

Working Principle

The gauge head operates on the inverted magnetron cold cathode ionization principle. A strong electric field and magnetic field inside the sensor cause electrons to move in spiral trajectories, ionizing residual gas molecules. The generated ions are collected by the central electrode, producing an ion current proportional to the gas pressure. The external controller measures this ion current and converts it into a pressure reading. Since there is no hot filament, the gauge is resistant to sudden gas inrushes and has a much longer service life than hot cathode ionization gauges.

Installation Requirements

• Mount via standard KF flange connection with appropriate vacuum seal
• Orient the gauge head to avoid direct exposure to process particle flux
• Ensure the gauge is properly grounded
• Use shielded cable for connection to the controller
• Allow sufficient clearance for cable connection and removal

Material & Structure

• Outer body made of 304 stainless steel with vacuum-tight construction
• Internal cathode and anode structure with high-purity metal electrodes
• Permanent magnet assembly providing the required magnetic field
• Ceramic-to-metal sealed electrical feedthrough
• Standard KF flange interface with elastomer seal

Usage Notes

• Do not expose the gauge to atmospheric pressure while powered on to avoid damage
• Periodically clean the internal electrodes to maintain measurement accuracy
• Allow the gauge to stabilize after system pump-down before taking readings
• Do not exceed the maximum bakeout temperature with cable attached
• Handle the gauge carefully to avoid damage to the ceramic seal and flange surface