Applied Materials 0040-96157

Product Name: Applied Materials 0040-96157 — Gas Panel Assembly / Showerhead Component (Semiconductor Equipment)

Product Overview: Precision gas delivery component used in Applied Materials CVD (Chemical Vapor Deposition) or Etch systems. Specifically a showerhead or gas injection manifold for wafer processing.

Category: Others

Description

Technical Specifications:

Parameter	Value
Manufacturer	Applied Materials (AMAT)
Part Number	0040-96157
Type	Showerhead / Gas Distribution Plate
Material	Anodized Aluminum 6061-T6 or Quartz (SiO₂) depending on variant
Channels	Multi-zone gas distribution (typically 20–100+ zones)
Operating Temp	Up to 400°C (Al) or 1000°C (Quartz)
Pressure Rating	Up to 10 Torr (process side)
Gas Compatibility	SiH₄, NH₃, N₂O, TEOS, WF₆, Cl₂, HBr, O₂, Ar, N₂
Surface Finish	Ra < 0.8 μm (gas-facing surface)
Dimensions	Matches specific chamber (e.g., Centura, Producer, Endura)
Coating	Y₂O₃ or SiC coating (for plasma etching variants)
Certification	AMAT internal spec, SEMI S2 compliant

Functional Features:

Uniform gas distribution across wafer surface (critical for film uniformity)
Multi-zone design — independent gas flow control per zone
Thermal management — embedded heater or cooling channels
Particle-free surface — Class 1 cleanroom manufactured
Quick-swap design — tool-less removal for PM (preventive maintenance)

Performance Parameters:

Metric	Value
Uniformity	<2% across 300mm wafer
Particle Generation	<0.1 particles/cm² (post-clean)
Lifetime	10,000–50,000 wafers (depending on process)
Leak Rate	<1 x 10⁻⁹ Torr·L/sec (He)

Applicable Industries: Semiconductor fabrication (front-end), MEMS manufacturing, LED production, solar cell manufacturing.

Installation Requirements:

Install in cleanroom environment (Class 1 or better)
Torque bolts to AMAT spec (typically 5–8 in-lbs)
Leak check with He before first use
Bake out at 150°C for 4 hours before process use

Usage Notes:

This is a consumable/wear part — replace per PM schedule
Do not use abrasive cleaners — use AMAT-approved solvents only
Match to correct chamber model (0040-96157 is specific to certain Centura/Producer platforms)

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