AMAT 0090‑76110

Technical Specifications:

• Bus Standard: VMEbus
• Processor: Motorola PowerPC 7457, 1 GHz
• Memory: Up to 512 MB SDRAM, 2 GB on‑board Flash memory
• I/O Interfaces: Serial port, parallel port, USB, PCI interface
• Working Voltage: 5 V DC ±5%
• Power Consumption: 25 W
• Physical Size: 233.4 mm × 160 mm
• Weight: 0.5 kg
• Operating Temperature: ‑40 °C ~ +85 °C
• Substrate Material: FR‑4 epoxy‑glass printed circuit board
• Functional Features:
• Executes equipment control software for AMAT Synergy series semiconductor process tools
• Completes real‑time logic control, sensor data acquisition and algorithm processing
• Realizes data interaction with each subsystem board through VME backplane bus
• On‑board large‑capacity Flash for program and configuration storage
• Multiple external I/O interfaces for peripheral device connection
• Supports hot‑swap maintenance in qualified VME chassis environment
• Working Principle: As embedded single‑board computer in VME chassis, the board runs real‑time operating system and AMAT equipment control software; reads sensor and status data of each sub‑board through VME bus; executes control algorithm and sends control commands to each functional board; completes data recording and external communication via on‑board I/O interfaces.
• Material Composition: FR‑4 multi‑layer printed circuit board, PowerPC processor chip, memory particle group, Flash storage chip, VME gold‑plated edge connector, various interface chips, on‑board power‑supply circuit components.
• Structural Characteristics: Standard 6U VME single‑board computer structure; gold‑plated VME bus edge connector; front‑panel equipped with handle for convenient plug‑in and pull‑out; external I/O port layout on front baffle.
• Application Scenarios: AMAT semiconductor manufacturing equipment including etching machine, deposition equipment, cleaning equipment and CMP equipment; core control component inside Synergy control cabinet of wafer fabrication equipment.
• Installation Requirements: Insert into standard 6U VME chassis slot; ensure full contact of gold‑plated VME bus connector; lock front‑panel fixing handle; chassis must meet heat‑dissipation and dust‑proof requirements for semiconductor workshop.