Agilent HP-5517B

Technical Specifications

• Nominal vacuum wavelength: 632.99137 nm
• Wavelength accuracy (3σ, lifetime): ±0.1 ppm
• Wavelength stability (typical 1 hour): ±0.002 ppm
• Wavelength stability (typical lifetime): ±0.02 ppm
• Beam diameter: 6 mm
• Beam height: 79.5 ± 1.0 mm
• Minimum output power: 120 µW
• Maximum output power: 1 mW
• Reference frequency: 1.9 MHz to 2.4 MHz
• Maximum measurement velocity with linear optics: 500 mm/s
• Warm-up time: 90 minutes
• Weight: 3.4 kg

Functional Features

• Integrates thermally tuned laser tube, control circuits, reference receiver and high-voltage power supply
• Provides highly stable single-frequency laser output for interferometric measurement
• Built-in reference frequency output for system calibration and signal processing
• Excellent long-term wavelength stability ensures measurement accuracy over time
• Compatible with standard interferometer optics and receiver components

Application Scenarios

• VME and PC-based laser interferometer position measurement systems
• Precision machine tool positioning and calibration
• Semiconductor manufacturing equipment motion control
• Coordinate measuring machines (CMM) and precision metrology
• Linear and angular displacement measurement in high-precision motion systems

Working Principle

The laser head generates a stabilized helium-neon laser beam through controlled gas discharge inside the laser tube. The thermal control system maintains the laser cavity at a constant temperature to ensure stable output wavelength. A built-in reference receiver detects the reference beam frequency and outputs a corresponding electrical signal for system signal processing. The emitted laser beam travels through external interferometer optics, and the reflected interference signal is analyzed to calculate precise displacement, velocity or angle information of the measured object.

Installation Requirements

• Mount on a stable mechanical platform to avoid vibration interference
• Align the optical axis accurately with matching interferometer components
• Connect +15 V and -15 V DC power supplies with specified current ratings
• Ensure adequate ventilation around the laser head for thermal stability
• Allow 90 minutes of warm-up time before taking precision measurements

Material & Structure

• Outer casing made of precision-machined aluminum alloy with good thermal conductivity
• Internal sealed helium-neon laser tube with high-temperature glass envelope
• Integrated high-voltage power supply module and signal conditioning circuit board
• Standard optical output port and electrical connector interface

Usage Notes

• Do not expose the laser output directly to human eyes to avoid injury
• Do not touch the optical output window to prevent surface contamination
• The laser head must be powered off before connecting or disconnecting cables
• Store and operate the device within the specified temperature and humidity range
• Periodically verify wavelength accuracy with calibrated reference standards