AMAT 0140‑76018

Technical Specifications

• Main Input Power: 24 VDC primary input
• Output Channel Count: Multiple fused protected DC‑output‑channels
• Per‑Channel Fuse Rating: Channel‑dependent fast‑blow semiconductor‑grade fuses
• Communication Interface: Tool internal parallel back‑plane bus
• Operating Temperature: 5 °C ~ +55 °C inside tool electronics bay
• Weight: 0.61 kg
• Function Features
• Individual hardware fuse over‑current‑protection for each field‑power‑output‑channel
• Channel‑level fault‑status feedback signals transmitted to main tool‑process‑controller
• Low‑outgassing material construction suitable for semiconductor clean‑room‑equipment environment
• Front‑panel visual LED‑status‑indicators for each output‑channel power‑state and fault‑condition
• Plug‑in rack‑module form‑factor for simplified maintenance‑and‑replacement
• Application Scenarios: Applied Materials semiconductor cluster tools; vacuum‑chamber auxiliary‑component power distribution; wafer‑handling‑robot auxiliary‑subsystem power supply; process‑chamber sensor and actuator power‑feed.
• Performance Parameters: Per‑channel maximum current rating defined by installed‑fuse value; input‑reverse‑polarity‑protection; transient‑voltage‑suppression on each output‑channel.
• Material Composition: Low‑outgassing FR‑4 printed‑circuit‑board; surface‑mount power‑semiconductor‑devices; industrial‑fast‑blow fuses; gold‑plated rack‑edge‑connectors; flame‑retardant plastic front‑panel assembly.
• Structural Characteristics: Card‑style plug‑in rack‑module; rear‑edge‑connector for back‑plane‑power‑and‑signal‑interface; front‑panel with status‑LED indicators and field‑wiring terminal‑blocks. Working Principle: Primary 24 VDC power input passes module‑input‑protection‑circuit; power is distributed to individual output‑channels each protected by dedicated fuse; fuse‑blow condition generates hardware‑fault‑signal sent to tool‑host‑controller; status‑LED provides local visual‑indication of channel‑fault‑events.
• Installation Requirements: Install inside climate‑controlled tool‑electronics‑rack; maintain specified cooling‑air‑flow‑clearance; observe correct polarity for field‑output‑wiring connections; tighten terminal‑block‑screws to specified torque‑value.