MKS T3BIB-29916

Product Name:​ Baratron® T3 Series Capacitance Manometer (Absolute Pressure Transmitter)
Product Introduction:​ Compact, high-stability absolute pressure gauge based on capacitance diaphragm sensing. Delivers true pressure readings independent of gas composition across vacuum to low-pressure ranges. Widely used where process repeatability depends on accurate chamber pressure feedback.
Category:
Description
Technical Specifications:
  • Manufacturer:​ MKS Instruments
  • Series / Model:​ Baratron® T3 / T3BIB-29916
  • Pressure Type:​ Absolute
  • Full Scale:​ 10 Torr (1333 Pa / 13.3 mbar)
  • Accuracy:​ ±0.25% FS (linearity + hysteresis + repeatability)
  • Repeatability:​ < ±0.05% FS
  • Output Signal:​ 0–10 V DC (load ≥ 10 kΩ)
  • Supply Voltage:​ ±15 V DC (typical consumption < 1.5 W)
  • Process Fitting:​ 1/4″ VCR female
  • Diaphragm Material:​ Inconel® 625
  • Sealing:​ All-metal seal, UHV compatible, bakeable to 150°C (electronics isolated)
  • Electronics Operating Temp:​ 0 °C to +50 °C
  • Compliance:​ CE, RoHS, SEMI F57
    Functional Features:​ Gas-type-independent measurement; corrosive-gas resistance (Cl₂, F₂, HBr, NH₃); negligible zero drift; direct analog output for PLC/DCS or closed-loop throttle valve control.
    Working Principle:​ Pressure deflection of a tensioned metal diaphragm changes capacitance versus a fixed electrode; conditioned capacitance converts to linear voltage output.
    Application Scenarios:​ Semiconductor PECVD/LPCVD/ALD/etch chambers; OLED evaporation; MOCVD reactors; mass spectrometers; leak detection; high-purity gas delivery.
    Installation Requirements:​ Vertical mount with port facing down; shielded twisted pair, separate power/signal routing; avoid particle entry into sensing cavity.
    Usage Notes:​ Do not exceed 10 Torr overpressure rating; isolate electronics during high-temperature bake; calibrate with certified vacuum reference before process use.
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