LAM 810-520659-001

Technical Specifications:

• Orifice Size: 5 mm – 50 mm (configurable)
• Actuation: Pneumatic, 0 – 100 psi
• Response Time: < 50 ms (open to close)
• CV Range: 0.01 – 10.0
• Leak Rate: < 1 × 10⁻⁹ mbar·L/s (He)
• Operating Temperature: -10°C to 80°C

Functional Features:

• Proportional position control via 4–20 mA signal
• Self-seating design for zero leakage in closed position
• Stem packing with zero backlash
• Integrated position sensor (LVDT or potentiometer)

Performance Parameters:

Material Composition:

• Body: 316L Stainless Steel, electropolished
• Stem: Hastelloy C-276
• Seat: PCTFE (Kel-F®) or PEEK
• Diaphragm: Stainless Steel 316L with Inconel® spring

Structural Features:

• Top-mounted actuator with vertical stem travel
• Clean-room compatible welds (orbital TIG)
• ISO-KF or VCR flange connections

Working Principle:
A pneumatic diaphragm actuator converts air pressure into linear stem motion. The stem moves a contoured plug relative to a precision-machined seat, varying the flow area. A position feedback sensor closes the control loop for proportional regulation.

Key Advantages:

• Zero leakage in closed position ensures process isolation
• < 50 ms response enables fast pressure transitions for advanced etch recipes
• PCTFE seat provides chemical resistance to Cl₂, HBr, SF₆

Applicable Industries: Semiconductor etch, PVD, CVD, plasma cleaning

Installation Requirements:

• Mount with actuator vertical, stem upward
• Supply air: filtered, oil-free, dew point < -40°C
• Electrical: 24 VDC for position sensor

Usage Notes:

• Inspect seat and plug for erosion every 500,000 cycles
• Replace diaphragm if response time degrades beyond 70 ms
• Do not operate with supply pressure exceeding 100 psi