AMAT 0190-51414

Product Series: Applied Materials P5000 / Centura Cleaning Systems

Product Introduction:
The 0190-51414 is a UV lamp housing assembly used in AMAT wet cleaning and photoresist strip chambers. It houses a broadband UV lamp (typically 200–400 nm) that generates UV radiation to enhance chemical cleaning reactions (photo-activated cleaning).

Category:
Description

Technical Specifications:

Parameter Value
Lamp Type Xenon short-arc / Mercury-Xenon broadband
Wavelength Range 200–400 nm (peak ~254 nm)
Power Rating 1000 W – 3000 W
Lamp Life 500–2000 hours
Housing Material Fused Quartz (UV-transparent) + 304 SS frame
Cooling Water-cooled jacket (deionized water)
Operating Temperature Up to 300°C (housing)
Dimensions ~300 × 100 × 80 mm
Electrical Connection High-voltage ignition + DC ballast

Material Composition:

  • Lamp Envelope: Fused quartz (UV-grade, > 90% transmission at 254 nm)
  • Reflector: Aluminum with MgF₂ coating (UV-enhanced)
  • Housing Frame: 304 Stainless Steel
  • Cooling Jacket: 316L Stainless Steel
  • Seals: Viton® O-rings (high-temp grade)

Structure Features:

  • Cylindrical quartz tube centered in SS reflector cavity
  • Water-cooled jacket surrounds reflector
  • High-voltage feedthrough for lamp ignition
  • Keyed mounting for alignment

Working Principle:
Electrical energy excites the xenon/mercury gas inside the quartz envelope, producing broadband UV radiation. The UV photons break chemical bonds in residual photoresist and organic contaminants (photolysis), accelerating the cleaning reaction: Organic + UV → CO₂ + H₂O + fragments. The reflector focuses UV energy toward the wafer surface.

Advantages & Highlights:

  • Photo-activated cleaning — 3–5× faster than thermal-only cleaning
  • Fused quartz envelope — maximum UV transmission, long life
  • Water-cooled — stable operation at high power
  • No consumables — lamp is the only replaceable part

Applicable Industries:

  • Semiconductor Wafer Cleaning
  • Photoresist Strip
  • Surface Preparation

Installation Requirements:

  • Mount in chamber UV port with quartz window alignment
  • Connect deionized water cooling (1–3 GPM, 20–25°C)
  • Connect high-voltage power supply (per lamp spec, typically 20–30 kV ignition)
  • Verify UV intensity with radiometer before production use (target > 50 mW/cm² at wafer)

Usage Precautions:

  • Do not touch quartz envelope with bare hands — oil causes hot spots and lamp failure
  • Replace lamp at 80% of rated life (do not wait for burnout)
  • Use only deionized water for cooling — minerals deposit on quartz and block UV
  • Wear UV-blocking safety glasses during lamp replacement
Reviews (0)

Reviews

There are no reviews yet.

Be the first to review “AMAT 0190-51414”

Your email address will not be published. Required fields are marked *

Shipping and Delivery

MAECENAS IACULIS

Vestibulum curae torquent diam diam commodo parturient penatibus nunc dui adipiscing convallis bulum parturient suspendisse parturient a.Parturient in parturient scelerisque nibh lectus quam a natoque adipiscing a vestibulum hendrerit et pharetra fames nunc natoque dui.

ADIPISCING CONVALLIS BULUM

  • Vestibulum penatibus nunc dui adipiscing convallis bulum parturient suspendisse.
  • Abitur parturient praesent lectus quam a natoque adipiscing a vestibulum hendre.
  • Diam parturient dictumst parturient scelerisque nibh lectus.

Scelerisque adipiscing bibendum sem vestibulum et in a a a purus lectus faucibus lobortis tincidunt purus lectus nisl class eros.Condimentum a et ullamcorper dictumst mus et tristique elementum nam inceptos hac parturient scelerisque vestibulum amet elit ut volutpat.