AMAT 0190-26873

Product Series: Applied Materials Centura / Producer PECVD & Etch Systems

Product Introduction:
The 0190-26873 is an RF impedance match network used in Applied Materials plasma etch and PECVD chambers. It matches the 50 Ω output of the RF generator to the variable impedance of the plasma load, maximizing power transfer and minimizing reflected power.

Category:
Description

Technical Specifications:

Parameter Value
Frequency Range 2 MHz – 60 MHz (typical: 13.56 MHz)
Power Rating Up to 5000 W
Impedance Range 5–2000 Ω (auto-tuning)
Tuning Speed < 100 ms
VSWR < 1.05:1 (when matched)
Cooling Water-cooled (deionized water)
Connectors 7/16 DIN / EIA flange
Dimensions ~400 × 300 × 200 mm

Material Composition:

  • Capacitors: Vacuum variable capacitors (ceramic + stainless steel)
  • Inductors: Air-core copper coil with silver plating
  • Housing: 304 Stainless Steel, electropolished
  • Cooling Jacket: 316L Stainless Steel

Structure Features:

  • Two-section L-type or Pi-type network topology
  • Motor-driven variable capacitors for automatic tuning
  • Water-cooled jacket for thermal management
  • RF shielding enclosure with grounding straps

Working Principle:
The match network uses variable capacitors and inductors to adjust the impedance seen by the RF generator. A control algorithm continuously monitors forward and reflected power and adjusts the capacitor positions to maintain VSWR < 1.05:1. This ensures maximum RF power is delivered to the plasma.

Advantages & Highlights:

  • Automatic tuning eliminates manual adjustment
  • Fast response time (< 100 ms) adapts to plasma impedance changes
  • High power handling up to 5 kW
  • Water cooling maintains stable operation under high duty cycles

Applicable Industries:

  • Semiconductor Etch (DRIE, RIE)
  • PECVD Deposition
  • Sputtering

Installation Requirements:

  • Connect to RF generator via 7/16 DIN coaxial cable
  • Supply deionized water at 2–5 GPM, 20–25°C
  • Ground all shielding straps to chamber ground
  • Verify tuning range with network analyzer before process use

Usage Precautions:

  • Do not operate without cooling water — risk of capacitor damage
  • Do not exceed 5000 W input power
  • Inspect variable capacitors quarterly for arcing damage
  • Use only AMAT-approved deionized water (resistivity > 1 MΩ·cm)
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