MKS 839‑13521‑1

Technical Specifications

• Actuation Mode: Pneumatic actuation
• Flange Standard: CF ConFlat flange
• Material Wetted Surface: 316L stainless‑steel
• Leak‑rate: < 10⁻⁹ mbar·L/s
• Operating Temperature: ‑185 °C ~ +200 °C Function Features
• Provides reliable vacuum‑line isolation for process‑chamber and pumping manifold
• Pneumatic‑actuated fast‑switching for vacuum‑system sequence control
• Metal‑seal CF flange interface for ultra‑high‑vacuum compatibility
• Built‑in valve‑position feedback switch for open‑/closed‑status signal output
• Resists corrosion from many semiconductor‑process‑gas species Application Scenarios: Semiconductor etch and deposition‑tool vacuum‑manifold, high‑vacuum analytical instruments, mass‑spectrometer systems, thin‑film vacuum‑coating equipment, research‑laboratory ultra‑high‑vacuum systems. Performance Parameters: Excellent metal‑seal vacuum‑tightness; long‑cycle‑life pneumatic‑actuator; low‑particle‑generation performance meeting semiconductor‑fab requirement. Material Composition: 316L stainless‑steel valve body and wetted‑path components; OFHC copper CF‑flange sealing gasket; aluminum pneumatic‑actuator housing; position‑feedback switch assembly. Structural Characteristics: Angle‑valve flow‑path geometry; CF ConFlat metal‑seal flanges; external pneumatic‑drive cylinder; mechanical‑limit‑position‑sensor for valve‑state feedback. Working Principle: Compressed‑air pneumatic signal drives internal actuator mechanism; actuator moves valve‑gate to realize opening or closing of vacuum flow‑path; metal‑seal structure achieves ultra‑low‑leak‑rate isolation; position‑sensor outputs digital signal reflecting actual valve‑gate mechanical‑position for host‑system logic interlock. Installation Requirements: Mount valve body without mechanical‑stress on flange connections; use designated OFHC copper gasket for CF‑flange; tighten flange bolts in diagonal‑cross‑sequence; connect clean dry instrument‑air supply for pneumatic‑actuator; wire position‑feedback‑signal cable to control‑system I/O module. Usage Notes: Prevent particulate contamination on metal‑seal‑gasket surface; avoid over‑torque‑tightening of CF‑flange bolts; use clean‑dry instrument‑air; perform leak‑check after installation or gasket replacement; do not exceed maximum operating‑temperature rating.