MKS 683B‑24883

Technical Specifications

• Communication Protocol: DeviceNet
• Valve Actuation: Direct gear drive
• Full Stroke Time: 1.7 seconds
• Resolution: 1 / 12000 of full stroke
• Ambient Motor Temperature: -20 °C ~ +40 °C
• Process Temperature Option: Standard 0‑100 °C; high‑temp option 0‑150 °C Function Features
• Supports pressure control mode and valve position control mode
• Adjustable PID gain, lead and hysteresis parameters
• Soft‑start function with configurable ramp‑up rate
• Manual valve override function for maintenance
• Reports valve cycle count, running hours, hardware and software revision information
• Configurable alarm trip points for pressure deviation and position deviationMKS Application Scenarios: Semiconductor etch chambers, PVD / CVD thin‑film deposition systems, vacuum coating equipment, high‑precision laboratory vacuum process systems. Performance Parameters: Closed leakage rate <10⁻⁷ Torr·L/s; maximum differential pressure across valve 1 atm; excellent pressure repeatability for recipe‑driven process. Material Composition: 316L stainless‑steel valve body; Viton sealing components; aluminum alloy electronic housing. Structural Characteristics: Compact integrated construction, electronic module mounted directly on valve assembly; standard flange interface; internal cosine‑generating mechanical structure for linearization of valve flow characteristic. Working Principle: Receives pressure setpoint over DeviceNet bus; compares setpoint against pressure transducer feedback; PID algorithm calculates required valve aperture; direct‑drive motor adjusts flapper valve opening, modulates pumping conductance to stabilize chamber vacuum pressure at target valueMKS. Installation Requirements: Mount on vibration‑damped support; correctly connect DeviceNet bus and terminating resistor; ensure process flange sealing gasket is properly installed; avoid mechanical stress on valve body. Usage Notes: Prevent particulate deposition on flapper sealing surface; do not exceed maximum differential pressure rating; perform valve‑step learning after installation or maintenance; avoid thermal shock to valve body.