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ZYGO ZMI-4004
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KONGSBERG TRX32 303088
KONGSBERG TRX32 303088

ZYGO ZMI-4004

Technical Specifications
  • Resolution: 0.15 nm
  • Velocity: 2.55 m/sec
  • Number of Axes: 4 axes per board
  • Data Rate: 10 MHz
  • Connection Types: ST fiber optic and HSSDC electrical connections
Category:
Description
Functional Features
  • High – Precision Measurement: With a resolution of 0.15 nm, it can provide extremely accurate displacement measurement results, which is crucial for applications requiring high precision.
  • Fast Measurement Speed: The ability to measure at a velocity of 2.55 m/sec enables it to keep up with high – speed moving objects, ensuring timely and accurate data acquisition.
  • Multi – axis Measurement: Supporting 4 – axis measurement, it can simultaneously measure the displacement of multiple axes, which is very useful for complex motion systems.
  • High – speed Data Rate: A 10 MHz data rate allows for quick transmission and processing of measurement data, improving the overall efficiency of the measurement system.
Application Scenarios
  • Lithography Tools: Such as e – beam and laser mask writers, optical steppers and scanners. The ZMI – 4004 helps these tools achieve significantly improved overlay and higher throughputs.
  • Metrology Tools: Including wafer, mask, and LCD measurement and inspection tools, and CD – SEMs. It provides high – precision measurement support for these metrology tools to ensure the quality of semiconductor and display products.
  • Calibration: Used for the measurement and calibration of high – frequency or high – resolution mechanical motions, ensuring the accuracy and reliability of mechanical systems.
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